Design and Analysis of MEMS-Based Piezoresistive Accelerometer with Low Cross-Axis Sensitivity
نویسندگان
چکیده
This paper presents a design and development of a high-performance silicon piezoresistive MEMS accelerometer, with a finite element analysis (FEA) and low cross-axis sensitivity. Finite element analysis is used to simulate electro statically actuated piezoresistive accelerometer operating under dc conditions .The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Due to of the opposite nature of stress at two ends, these piezoresistors can be connected to form a Wheatstone bridge so that the cross-axis responses are practically reduced .The piezoresistors are placed near the proof mass and frame ends on the flexure. The simulations show the von Misses stress, displacement, Eigen frequency plot, voltage distribution and temperature change in the piezoresistors using COMSOL 4.3 Multiphysics.
منابع مشابه
New Design of Mems piezoresistive pressure sensor
The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...
متن کاملThree-axis piezoresistive accelerometer with adjustable axial resolutions
A three-axis piezoresistive accelerometer which has adjustable resolutions to three axes was developed using MicroElectroMechanical Systems (MEMS) technology. This sensor made of a heavy proof mass and four long beams is to obtain high resolutions by reducing resonance frequencies. Adjustable resolution with small cross axis sensitivity could be obtained by a three-dimensional sensor structure.
متن کاملA Low-Cost CMOS-MEMS Piezoresistive Accelerometer with Large Proof Mass
This paper reports a low-cost, high-sensitivity CMOS-MEMS piezoresistive accelerometer with large proof mass. In the device fabricated using ON Semiconductor 0.5 μm CMOS technology, an inherent CMOS polysilicon thin film is utilized as the piezoresistive sensing material. A full Wheatstone bridge was constructed through easy wiring allowed by the three metal layers in the 0.5 μm CMOS technology...
متن کاملDevelopment of a Novel Two Axis Piezoresistive Micro Accelerometer Based on Silicon
This paper describes the design, simulation, fabrication and test results of a novel MEMS two axis accelerometer, which is based on piezoresistive detection. This kind of sensor consists of four vertical cantilever beams with attached plastic cylinder in the center of the structure. A simplified analytical model is established to describe the accelerometer’s mechanical behaviour. Finite element...
متن کاملMechanical Structural Design of a MEMS-Based Piezoresistive Accelerometer for Head Injuries Monitoring: A Computational Analysis by Increments of the Sensor Mass Moment of Inertia †
This work focuses on the proof-mass mechanical structural design improvement of a tri-axial piezoresistive accelerometer specifically designed for head injuries monitoring where medium-G impacts are common; for example, in sports such as racing cars or American Football. The device requires the highest sensitivity achievable with a single proof-mass approach, and a very low error (<1%) as the a...
متن کامل